Diffusion pump | Vacuum Pump Vacuum System Solution Suppiler

Diffusion pump

Category:
[ssba]
INQUIRY

K-type and KT-type metal oil diffusion pumps (hereinafter referred to as diffusion pumps) are suitable for the electronic industry, chemical industry, vacuum smelting, atomic energy industry and other fields to evacuate the evacuated container and achieve high vacuum (up to 10-⁵Pa).
Diffusers are used to remove gases that are not seriously harmful to the working liquid in high vacuum systems.

Model composition and its representative meaning

K-100:
K: represents the metal oil diffusion pump
100: indicates the diameter of the air inlet (mm)

K-150T:
K: represents the metal oil diffusion pump
150: indicates the diameter of the air inlet (mm)
T: indicates that the pump shell is made of convex cavity

A. Main parameters of type A diffusion pump are shown in Table 1.
Table 1

 model  

K-100

 

K-150

 

K-200

 

K-300

 

K-400

 

K-630

 

K-800

 

inlet diameter(mm)

 

100

 

150

 

200

 

300

 

400

 

630

 

800

 

Gas extraction rate (L/S)

 

300

 

800

 

1500

 

3300

 

5300

 

14000

 

22000

 

Extreme pressure(Pa)

 

7×10⁻⁵

Maximum exhaust pressure(Pa)  

40

 

Oil injection (L)

 

0.11

 

0.3

 

0.5

 

1.3

 

2.5

 

5

 

15

 

heating power(kW)

 

0.65

 

1~1.2

 

1.5

 

2.1

 

4.8

 

9

 

19.8

 

The main parameters of the KT type diffusion pump are shown in Table 2.

Table 2

 model  

K-150T

 

K-200T

 

K-300T

 

K-400T

 

K-500T

 inlet diameter (mm) 150 200 300 400 500
Gas extraction rate (L/S) 1000 2000 4000 7000 10000
 extreme pressure (Pa) 7×10⁻⁵
Maximum exhaust pressure

(Pa)

 

40

Oil injection (L) 0.3 0.5 1.3 2.4 3.7
 heating power (kW) 1.2 1.5 3 4.5 6